JPH0425704Y2 - - Google Patents

Info

Publication number
JPH0425704Y2
JPH0425704Y2 JP1988170207U JP17020788U JPH0425704Y2 JP H0425704 Y2 JPH0425704 Y2 JP H0425704Y2 JP 1988170207 U JP1988170207 U JP 1988170207U JP 17020788 U JP17020788 U JP 17020788U JP H0425704 Y2 JPH0425704 Y2 JP H0425704Y2
Authority
JP
Japan
Prior art keywords
cup
chemical liquid
tank
chemical
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988170207U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0290843U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988170207U priority Critical patent/JPH0425704Y2/ja
Publication of JPH0290843U publication Critical patent/JPH0290843U/ja
Application granted granted Critical
Publication of JPH0425704Y2 publication Critical patent/JPH0425704Y2/ja
Expired legal-status Critical Current

Links

JP1988170207U 1988-12-30 1988-12-30 Expired JPH0425704Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170207U JPH0425704Y2 (en]) 1988-12-30 1988-12-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170207U JPH0425704Y2 (en]) 1988-12-30 1988-12-30

Publications (2)

Publication Number Publication Date
JPH0290843U JPH0290843U (en]) 1990-07-18
JPH0425704Y2 true JPH0425704Y2 (en]) 1992-06-19

Family

ID=31460952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170207U Expired JPH0425704Y2 (en]) 1988-12-30 1988-12-30

Country Status (1)

Country Link
JP (1) JPH0425704Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0611024B2 (ja) * 1986-12-29 1994-02-09 東京エレクトロン株式会社 現像方法

Also Published As

Publication number Publication date
JPH0290843U (en]) 1990-07-18

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